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112學年材料所-第六週 專題研討課程演講公告(112年10月19日)

2023.10.12

112學年上學期 材料所專題研討課程 公告
 
題目:
全自動化大範圍三維背向散射繞射電子系統之建置與應用
Development and application of a large-volume, fully automated 3D electron backscatter diffraction (EBSD) system
主講人:蔡劭璞 博士
現職:國立台灣大學 材料 助理教授
學歷:國立台灣大學 材料系 博士
 
時間:112 10 19(下午 3:10 – 5 :00
地點:成功大學成功校區三系館 鋼構區(3F)共同教室A1302演講廳
演講摘要:
A fully automatic large-volume 3D electron backscatter diffraction (EBSD) system (ELAVO 3D), consisting of a ZEISS scanning electron microscope with a dedicated sample holder, an adapted polishing automaton (QATM Saphir X-change), a collaborative robotic arm (Universal Robots UR5), and several in-house built gadgets, was developed. The whole system is orchestrated by a self-designed software, which is also able to track the process and report errors. For the measurement of removal thickness, the samples are featured with markers put on the perpendicular lateral surface, cut by plasma focused ion beam (PFIB). The individual effects of both 1 μm diamond suspension and oxide polishing suspension polishing were studied. Coherent twin grain boundaries (GBs) were used as an internal standard to check the removal rates measured by the side markers. The last part of the presentation covers the applicability of the system on several cases, with a focus on additively manufactured 316L stainless steel.
 
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